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Full Process ln-Line | Gantry Moving Coater & Air Floating Coater | VCD System | HP/CP System |
Application | For Photo Lithography Process Loader & Unloader PPCLN & Developer Coater & VCD (Vacuum Chamber Dryer) Soft Baker, Hard Baker, Storage Capability Size : Gen.2 ~ Gen.8 |
Purpose | OLED, LCD CF & TFT, TSP |